Thin film electrical component

Details Thin film electrical component Thin film electrical component

1990-02-14

1992-04-28

Ryan, Patrick J.

Stock material or miscellaneous articles

Structurally defined web or sheet

Discontinuous or differential coating, impregnation or bond

428 40, 428209, 4284235, 428426, 428433, 428435, 428457, 428901, 501 66, B32B 300

Patent

active

051088193

ABSTRACT:
A biocompatible thin film electrical component is configured for use in a human body or other ionic liquid environment. A polyimide substrate is bonded to a glass carrier plate sized for handling by automatic equipment and a multiple-layer metal conductor is deposited on the substrate and patterned to define an electrical circuit or biosensor. The polyimide and the glass establish a bond therebetween that withstands handling yet is know using biocompatible releasing agents and techniques. The polyimide substrate and glass carrier plate preferably have similar thermal expansion properties to reduce the likelihood of fracture and delamination problems during release of the substrate from the carrier plate. An insulation layer covers the metal conductor and, in one embodiment, is made of polyimide having a cure temperature lower than the temperature at which interediffusion occurrs in the metal layers in the conductor.

REFERENCES:
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"Fabrication of a Microbial Carbon Dioxide Sensor Using Semiconductor Fabrication Techniques", H. Suzuki et al., Electroanalysis, 1 (1989), pp. 305-309.
"Planar Amperometric Enzyme-Based Glucose Microelectrode", M. Koudelka et al., Sensors and Actuators, 18 (1989), pp. 157-165.
"Fabrication and Characterization of a Planar Electrochemical Cell and its Application as a Glucose Sensor", S. Gernet et al., Sensors and Actuators, 18 (1989), pp. 59-70.
"A Planar Glucose Enzyme Electrode", S. Gernet et al., Sensors and Actuators, 17 (1989), pp. 537-540.
"Fabrication of a Micro Oxygen Electrode and its Application", H. Suzuki et al., Proc.-Electrochem. Soc. 1987, 87-89 (Proc. Symp. Chem. Sens.), pp. 393-400 (Eng).

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