Measuring and testing – Surface and cutting edge testing – Roughness
Patent
1996-12-10
1999-01-19
Noland, Thomas P.
Measuring and testing
Surface and cutting edge testing
Roughness
269 57, 310333, G01B 734
Patent
active
058615490
ABSTRACT:
A topographic head for profilometry and AFM supports a central paddle by coaxial torsion bars projecting inward from an outer frame. A tip projects from the paddle distal from the bars. The torsion bars include an integrated paddle rotation sensor. A XY stage may carry the topographic head for X and Y axis translation. The XYZ stage's fixed outer base is coupled to an X-axis stage via a plurality of flexures. The X-axis stage is coupled to a Y-axis stage also via a plurality of flexures. One of each set of flexures includes a shear stress sensor. A Z-axis stage may also be included to provide an integrated XYZ scanning stage. The topographic head's frame, bars and paddle, and the XYZ stage's stage-base, X-axis, Y-axis and Z-axis stages, and flexures are respectively monolithically fabricated by micromachining from a semiconductor wafer.
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Neukermans Armand P.
Slater Timothy G.
Noland Thomas P.
Schreiber Donald E.
Xros, Inc.
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