Method of forming SI-O containing coatings

Details Method of forming SI-O containing coatings Method of forming SI-O containing coatings

1993-09-13

1994-06-14

Lusignan, Michael

Coating processes

Heat decomposition of applied coating or base material

Coating decomposed to form carbide or coating carbonized

427387, 427226, 428688, B05D 302

Patent

active

053208684

ABSTRACT:
Disclosed is a method for forming improved Si--O containing coatings on electronic substrate. The method comprises converting hydrogen silsesquioxane resin into a Si--O containing ceramic coating in the presence of hydrogen gas. The resultant coatings have improved properties such as stable dielectric constants.

REFERENCES:
patent: 4749631 (1988-06-01), Halusta et al.
patent: 4756977 (1988-07-01), Haluska et al.
patent: 4911992 (1990-03-01), Halusta et al.

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