Processing apparatus and method

Coating processes – Electrical product produced – Condenser or capacitor

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Details

427 93, 427255, 4272556, 4272071, 118733, 118729, 118725, 118676, 118500, 414217, 430272, B05D 512, C23C 1600

Patent

active

045929262

ABSTRACT:
A vacuum processing apparatus and method utilize a vacuum chamber formed from a pair of casing sections, one of which is movable in to and out of sealing engagement with the other casing section. The movable casing section is equipped to carry a workpiece such that the workpiece is carried by the movable casing section as it moves into and out of sealing engagement with the other casing section and such that the workpiece is delivered to a processing station associated with the other casing section when the two casing sections are in sealing engagement with each other.

REFERENCES:
patent: 3549368 (1970-12-01), Collins et al.
patent: 3921572 (1975-11-01), Brunner et al.
patent: 3981791 (1976-09-01), Rosvold
patent: 4058430 (1977-11-01), Suntola et al.
patent: 4226208 (1980-10-01), Nishida et al.
patent: 4311427 (1982-01-01), Coad et al.
patent: 4338883 (1982-07-01), Mahler
patent: 4373470 (1983-02-01), Martin
patent: 4382739 (1983-05-01), Mack et al.
Mittall et al, "Vapor Deposited Adhesion Promoters" IBM Technical Disclosure Bulletin, vol. 17, No. 12, May 1975 p. 3718.

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