High sensitivity temperature sensor and sensor array

Details High sensitivity temperature sensor and sensor array High sensitivity temperature sensor and sensor array

1995-03-01

1997-11-11

Dougherty, Thomas M.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310311, G01K 1126, G01K 732, H01L 4104

Patent

active

056867794

ABSTRACT:
A highly sensitive thermal sensor is disclosed which uses a thermally isolated, thermometer cut quartz microresonator that is configured to be exposed to a radiant energy source.

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