Resins for use as electron resists

Details Resins for use as electron resists Resins for use as electron resists

1975-11-06

1977-08-09

Newsome, John H.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

96 351, 96 362, 96115R, 427 44, 427273, B05D 306

Patent

active

040411915

ABSTRACT:
An electron sensitive resin comprising a random polymer of ethylene glycol methacrylate with triethylene glycol dimethacrylate, randomly crosslinked, and having a degree of polymerization of from 10 to 1000, is described.

REFERENCES:
patent: 2413973 (1947-01-01), Honk et al.
patent: 3628963 (1971-12-01), Akamatsu et al.
patent: 3799915 (1974-03-01), Dunnavant et al.
patent: 3840390 (1974-10-01), Kozu et al.
patent: 3859099 (1975-01-01), Petropoulos et al.

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