Method of manufacturing a semiconductor device having an out dif

Details Method of manufacturing a semiconductor device having an out dif Method of manufacturing a semiconductor device having an out dif

1994-02-28

1997-11-11

Niebling, John

Fishing, trapping, and vermin destroying

437192, 437200, H01L 21265, H01L 2144

Patent

active

056863233

ABSTRACT:
A method of manufacturing a semiconductor device comprises the steps of:

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Stanley Wolf, Silicon Processing the VLSI Era, vol. 2, pp. 121-132, 1990.

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