Method of making an integral, multiple layer antireflection coat

Details Method of making an integral, multiple layer antireflection coat Method of making an integral, multiple layer antireflection coat

1985-04-01

1986-06-03

Roy, Upendra

Metal working

Method of mechanical manufacture

Assembling or joining

29576B, 148 15, 148187, 148DIG153, 136256, 427 38, 427 74, 427 75, H01L 3106, B05D 306

Patent

active

045921296

ABSTRACT:
A process is disclosed for fabricating an improved antireflection coating on a substrate. A layer of dielectric material having a first thickness and a first index of refraction are formed overlying a substrate. The dielectric material is implanted with hydrogen to form an implanted surface region having a thickness less than the thickness of the entire layer of dielectric material. The hydrogen reduces the index of refraction of the implanted region to a value less than the index of refraction of the initial layer. The structure overlying the substrate thus includes two integral layers having different indices of refraction with the lower index of refraction, as desired, at the surface of the dielectric material. The process can be extended by further implantation to provide an increased number of distinct layers of differing index or to provide a continuum of regions of varying index of refraction.

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