Optical semiconductor device and method of fabricating the same

Details Optical semiconductor device and method of fabricating the same Optical semiconductor device and method of fabricating the same

1996-03-13

1999-03-30

Ullah, Akm E.

Optical waveguides

Planar optical waveguide

Thin film optical waveguide

385 2, G02B 610

Patent

active

058899138

ABSTRACT:
This invention provides an optical semiconductor device including a semiconductor substrate having a mesa stripe in which at least an optical waveguide layer is formed, a major surface of the semiconductor substrate being a crystal plane, a semiconductor buried layer formed on the two side surfaces of the mesa stripe, and a stripe cladding layer formed on the mesa stripe region and the semiconductor buried layer and having a shape whose section is substantially trapezoidal and whose side surfaces are crystal planes.

REFERENCES:
patent: 4644551 (1987-02-01), Kawano et al.
patent: 4667332 (1987-05-01), Mihashi et al.
patent: 5019519 (1991-05-01), Tanaka et al.
patent: 5042049 (1991-08-01), Ohtoshi et al.
patent: 5450437 (1995-09-01), Shim et al.
"DRF-LD/Modulator Integrated Light Source by Bandgap Energy Controlled Selective MOVPE", Electronics Letters, vol. 28, No. 2, T. Kato, et al.; pp. 153-154, Jan. 1992.

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