Coordinate measuring apparatus

Geometrical instruments – Gauge – Coordinate movable probe or machine

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Details

33 1M, 33702, G01B 503

Patent

active

050313312

ABSTRACT:
A coordinate measuring apparatus includes guides made of aluminum. Scales which are also made of aluminum are used to measure the position of the measuring slide movable on the guides. In a preferred embodiment, the scales are in the form of a reflection phase grating and are applied directly to the surface of the guide member. In addition, a temperature sensor is provided which measures the temperature of the guide member and of the scale divisions. A method of producing the scale divisions is also disclosed.

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patent: 4852267 (1989-08-01), Tezuka
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patent: 4895454 (1990-01-01), Kammleiter et al.
patent: 4912856 (1990-04-01), Ernst
patent: 4947557 (1990-08-01), Gapshis

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