Piezo-electric/electrostrictive film type element

Details Piezo-electric/electrostrictive film type element Piezo-electric/electrostrictive film type element

1996-10-08

1999-03-30

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310324, H01L 4108

Patent

active

058893520

ABSTRACT:
A piezo-electric/electrostrictive film type element is constituted of a ceramic substrate including a spacer plate having at least one window, and a thin closure plate for closing the window, integrally joined to the spacer plate, and a piezo-electric/electrostrictive working portion having a lower electrode, a piezo-electric/electrostrictive layer and an upper electrode disposed in turn in the form of a layer at a closure position of the window on the outer surface of the closure plate by a film formation method. The piezo-electric/electrostrictive layer is arranged so as to cover a part only of the area of the window in a plan view. Since at the end portions of the void, the piezo-electric/electrostrictive working portion does not pick up fluctuation and vibration which would contain noise at the end portions of the void, the noise at the time of sensing, filtering or acoustic oscillation can be remarkably minimized, and a gap between the characteristics of a simulation at the time of design and those of the actual product can be remarkably reduced.

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