Thermal measuring and testing – Thermal calibration system – By thermal radiation emitting device
Patent
1997-09-05
1999-11-23
Bennett, G. Bradley
Thermal measuring and testing
Thermal calibration system
By thermal radiation emitting device
374 2, 374129, 2502521, 356 43, G01K 1500, G01J 502
Patent
active
059888741
ABSTRACT:
A method for calibrating an optical pyrometer to an external reference point. By changing the focus of the optical pyrometer without physically moving the pyrometer, calibration of the optical pyrometer can be accomplished without modifying the semiconductor operation. Broadly speaking, the present invention contemplates an apparatus for calibrating an optical pyrometer. The apparatus includes a first optical source in a heating chamber with an optical port, an optical pyrometer, a mirror, and a second optical source. The optical pyrometer is positioned to receive light rays from a first optical source residing inside the heating chamber. The second optical source is located external to the heating chamber. The second optical source serves as an external reference point. The external location of the second optical source allows for calibration of the optical pyrometer without modification of the heating chamber or the first optical source residing inside the heating chamber. The mirror is positioned between the heating chamber and the optical pyrometer. The mirror is situated in such a way as to permit the optical pyrometer to receive light rays from the second optical source.
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Advanced Micro Devices , Inc.
Bennett G. Bradley
Daffer Kevin L.
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