Pressure sensor with stress isolation platform hermetically seal

Details Pressure sensor with stress isolation platform hermetically seal Pressure sensor with stress isolation platform hermetically seal

1994-04-04

1995-11-14

Williams, Hezron E.

Measuring and testing

Fluid pressure gauge

Diaphragm

73706, 73716, 73721, 73727, 73754, G01L 906

Patent

active

054656265

ABSTRACT:
An electronic pressure sensor (10) is enhanced by attaching a sensor die (18) to a stress isolation platform (12) using an adhesive (42) having a similar thermal coefficient of expansion. The adhesive provides a hermetic seal between the stress isolation platform and the pressure sensor die. A via (20) in the stress isolation platform provides an opening for pressure to be applied to the sensor die. The stress isolation platform is attached to a plastic package body (16) via a semi-rigid adhesive (40) for providing stress isolation and a hermetic seal between the package body and the stress isolation platform. Any hostile chemical entering the via contacts an exposed diaphragm (50) of the sensor die to assert pressure against its piezoelectric network (52) to generate the electrical signals representative of the applied pressure but are kept away from the sensitive interconnects by the hermetic seals.

REFERENCES:
patent: 4019388 (1977-04-01), Hall, II et al.
patent: 4373397 (1983-02-01), Keller
patent: 4726233 (1988-02-01), Eckardt et al.
patent: 4776218 (1988-10-01), Sawa et al.
patent: 4898035 (1990-02-01), Yajima et al.
patent: 5060520 (1991-10-01), Strasser
patent: 5089445 (1992-02-01), Francis
patent: 5230248 (1993-07-01), Cucci et al.

Affiliated with

Also associated with

Rating

Pressure sensor with stress isolation platform hermetically seal does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Pressure sensor with stress isolation platform hermetically seal, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Pressure sensor with stress isolation platform hermetically seal will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1214185