Ramped foot support

Details Ramped foot support Ramped foot support

1996-07-19

1998-07-07

Hannaher, Constantine

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

250332, 437 3, H01L 27144, H01L 3118

Patent

active

057773289

ABSTRACT:
A support arm for a bolometer suspended over a substrate contacts the underlying substrate in the form of a triangular wedge. The support arm may be a dielectric coated silicon with a metal conductor on the support arm and extending to a contact pad on the substrate.

REFERENCES:
patent: 5500761 (1996-03-01), Goossen et al.

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