Organic compounds -- part of the class 532-570 series – Organic compounds – Heterocyclic carbon compounds containing a hetero ring...
Patent
1992-04-20
1994-02-15
Raymond, Richard L.
Organic compounds -- part of the class 532-570 series
Organic compounds
Heterocyclic carbon compounds containing a hetero ring...
546261, 546269, 546283, 546284, 546288, 546294, 546295, C07D21389
Patent
active
052868672
ABSTRACT:
1-Sulfonyloxy-2-pyridones of the formula I ##STR1## show good radiation sensitivity over a wide spectral range and are therefore valuable as photoactive compounds in radiation-sensitive mixtures.
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Taylor et al., "Thallium in Organic Synthesis", J. Org. Chem., 35, 1672, 1970, p. 1568.
Ueno et al., "Chemical Amplification Positive Resist Systems Using Novel Sulfonates as Acid Generators", in Polymers for Microelectronics-Science and Tech., edited by Y. Tabata et al., Kodansha-Weinheim-New York, 1989, pp. 66-67.
Lohaus Gerhard
Pawlowski Georg
Spiess Walter
Hoechst Aktiengesellschaft
Raymond Richard L.
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