Polishing method and polishing apparatus

Details Polishing method and polishing apparatus Polishing method and polishing apparatus

1996-11-04

1998-07-07

Rose, Robert A.

Abrading

Machine

Rotary tool

451286, 451287, 451288, 451289, 451 7, 451 53, 451 60, 451488, B24B 500

Patent

active

057759804

ABSTRACT:
This invention provides a polishing method including the steps of forming a film to be polished on a substrate having a recessed portion in its surface so as to fill at least the recessed portion, and selectively leaving the film to be polished behind in the recessed portion by polishing the film by using a polishing agent containing polishing particles and a solvent, and having a pH of 7.5 or more. The invention also provides a polishing apparatus including a polishing agent storage vessel for storing a polishing agent, a turntable for polishing an object to be polished, a polishing agent supply pipe for supplying the polishing agent from the polishing agent storage vessel onto the turntable, a polishing object holding jig for holding the object to be polished such that the surface to be polished of the object opposes the turntable, and a polishing agent supply pipe temperature adjusting unit, connected to the polishing agent supply pipe, for adjusting the temperature of the polishing agent.

REFERENCES:
patent: 4450652 (1984-05-01), Walsh
patent: 4513894 (1985-04-01), Doyle et al.
patent: 5127196 (1992-07-01), Morimoto et al.

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