Optical inspection apparatus and illumination system particularl

Details Optical inspection apparatus and illumination system particularl Optical inspection apparatus and illumination system particularl

1991-05-07

1992-10-06

Rosenberger, Richard A.

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

G01N 2117

Patent

active

051536684

ABSTRACT:
Optical inspection apparatus includes an illumination system illuminating an area of the workpiece surface with a sky of illumination which is, with respect to each point in the illuminated area, substantially circularly symmetric over a solid angle around the optical axis passing perpendicularly through the electro-optical sensor and the workpiece surface.

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patent: 4881802 (1989-11-01), Stankewitz
Goodman, "Illuminator for Dark Field Microscopy", Aug. 15, 1984 Applied Physics pp. 2670-2671.
Goodman, "Illuminators Based on Fiber Rings"Jun. 1, 1985 Applied Physics pp. 1560-1561.

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