Method of manufacturing thin film EL device utilizing a shutter

Details Method of manufacturing thin film EL device utilizing a shutter Method of manufacturing thin film EL device utilizing a shutter

1993-06-22

1994-12-13

Beck, Shrive

Coating processes

Measuring, testing, or indicating

427 9, 427 10, 427 64, 4271262, 4272552, 427566, 427585, B05D 512

Patent

active

053728378

ABSTRACT:
A method of manufacturing a thin film electroluminescent (EL) device in which an electron beam is directed to a pellet of a substance containing an additive agent, and the substance is evaporated and deposited on a substrate and a change per unit time of the growing deposit is monitored by a sensor, comprising the steps of (1) controlling energy of the electron beam in accordance with an output of the sensor during a first time interval for adjusting an evaporation rate of the substance to a specified rate, (2) maintaining the controlled energy of the electron beam constant during a second time interval, larger than the first time interval and alternatively repeating steps (1) and (2).

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