Method and apparatus for detecting patterns

Details Method and apparatus for detecting patterns Method and apparatus for detecting patterns

1991-01-14

1992-10-06

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

356394, G01N 2188

Patent

active

051534444

ABSTRACT:
A method and apparatus for detecting a defect in a circuit pattern by detecting a gray image signal from each of a plurality of circuit patterns as objects of inspection, which circuit patterns have been fabricated so as to be identical with one another, and detecting a defect as a difference of edge position between two circuit patterns by comparing the detected gray image signal of one circuit pattern with the detected gray image signal of another circuit pattern.

REFERENCES:
patent: 4449818 (1984-05-01), Yamaguchi et al.
patent: 4725722 (1988-02-01), Maeda et al.
patent: 4731855 (1988-03-01), Suda
patent: 4791586 (1988-12-01), Maeda et al.

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