Stress tolerant bolometer

Radiant energy – Invisible radiant energy responsive electric signalling – Infrared responsive

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2503384, G01J 520

Patent

active

057897530

ABSTRACT:
Bolometer array with active bolometers suspended over a substrate and a periphery of dummy bolometers making contact with the substrate, this allows bolometer formation under stress conditions.

REFERENCES:
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patent: 5021663 (1991-06-01), Hornbeck
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patent: 5399897 (1995-03-01), Cunningham et al.
patent: 5486698 (1996-01-01), Hanson et al.
High-Performance Infrared Thermal Imaging with Monlithic Silicon Focal Planes Operating at Room Temperature, Proceedings of the International Electron Device Meeting, Dec. 5-8, 1993; pp. 175-177.

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