Piezoelectric/electrostrictive film element having convex diaphr

Details Piezoelectric/electrostrictive film element having convex diaphr Piezoelectric/electrostrictive film element having convex diaphr

1995-02-09

2000-04-11

Dougherty, Thomas M.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310324, H01L 4108

Patent

active

060491582

ABSTRACT:
A piezoelectric/electrostrictive film element which includes a ceramic substrate having at least one window and a diaphragm portion for closing each window, and a film-like piezoelectric/electrostrictive unit formed on the diaphragm portion. The diaphragm portion has a convex shape and protrudes outwards, in a direction away from the corresponding window. The piezoelectric/electrostrictive unit includes a lower electrode, a piezoelectric/electrostrictive layer and an upper electrode, which are formed in lamination in the order of description on a convex outer surface of the diaphragm portion by a film-forming method. Also disclosed is a method of producing the piezoelectric/electrostrictive film element as described above.

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