Method of manufacturing a high density magnetic memory device

Details Method of manufacturing a high density magnetic memory device Method of manufacturing a high density magnetic memory device

1997-12-18

2000-04-11

Nguyen, Tuan H.

Semiconductor device manufacturing: process

Having magnetic or ferroelectric component

438171, 438210, 438131, H01L 2100

Patent

active

060487399

ABSTRACT:
A high density magnetic memory device and method of manufacture therefor, wherein the magnetic bit region is provided after selected higher temperature processing steps are performed. Illustrative higher temperature processing steps include those that are performed above for example 400.degree. C., any may include contact and via plug processing. The present invention may allow, for example, contact and via plug processing to be used to form magnetic RAM devices. As indicated above, contact and/or via plug processing typically allows the size of the contacts and vias to be reduced, and the packing density of the resulting memory device to be increased.

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