Mask including optical shield layer having variable light transm

Details Mask including optical shield layer having variable light transm Mask including optical shield layer having variable light transm

1998-03-10

2000-04-11

Rosasco, S.

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

G03F 900

Patent

active

060486481

ABSTRACT:
In a mask including an optical shield layer formed on a transparent substrate, the light transmittance of the shield layer is changed in accordance with the density of patterns of the shield layer or the thickness of a photoresist layer on a semiconductor substrate.

REFERENCES:
patent: 5318868 (1994-06-01), Hasegawa et al.
patent: 5490896 (1996-02-01), Yagi et al.

Affiliated with

Also associated with

Rating

Mask including optical shield layer having variable light transm does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Mask including optical shield layer having variable light transm, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Mask including optical shield layer having variable light transm will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1175130