Method for making thermochromic photomasks

Details Method for making thermochromic photomasks Method for making thermochromic photomasks

1979-04-10

1980-09-30

Kimlin, Edward C.

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

430 4, 430198, 430321, 430330, 430401, G03C 500

Patent

active

042256593

ABSTRACT:
An orange colored photomask visually transmissive to yellow-orange light formed by heating an exposed and developed silver-halide emulsion coated photomask. At approximately 200.degree. C., black silver in the photomask begins to show evidence of conversion to a transparent red material. At a temperature of 250.degree. C. to 320.degree. C., the black silver opaque images are rapidly converted to orange, visually transmissive images which are essentially opaque to the ultraviolet light used to expose photoresist covered silicon wafers, while clear areas remain clear.

REFERENCES:
patent: 2911749 (1959-11-01), Stookey
patent: 3406066 (1968-10-01), Avery
patent: 3567447 (1971-03-01), Chand
patent: 3664837 (1972-05-01), Stanley
patent: 3674484 (1972-07-01), Spinski
patent: 4004925 (1977-01-01), Van Besauw et al.

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