VMJ Solar cell fabrication process using mask aligner

Details VMJ Solar cell fabrication process using mask aligner VMJ Solar cell fabrication process using mask aligner

1984-05-16

1985-10-22

Weisstuch, Aaron

Metal working

Method of mechanical manufacture

Assembling or joining

29578, 29583, 430 22, 148DIG102, H01L 3118

Patent

active

045479585

ABSTRACT:
A novel method and device for accurately aligning a substrate comprising a silicon wafer in the fabrication of a silicon vertical junction solar cell are described which comprise a base plate having a recess therein defining an opening for snugly receiving the wafer, the recess including a substantially straight portion for mating with a cleaved edge of known crystallographic orientation provided on the wafer, and a mask plate for covering the base plate and wafer, the mask including a pattern in predetermined configuration through which the wafer may be exposed in the fabrication process for the solar cell.

REFERENCES:
patent: 3461566 (1969-08-01), Gerstner
patent: 3615474 (1971-10-01), Rosenberger
patent: 3685117 (1972-08-01), Wing et al.
patent: 3963489 (1976-06-01), Cho
patent: 4330932 (1982-05-01), Morris et al.
patent: 4377627 (1983-03-01), Vinton
patent: 4414749 (1983-11-01), Johannsmeier
patent: 4418467 (1983-12-01), Iwai

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