Photomask carrier and container for photomask carrier

Photocopying – Projection printing and copying cameras – Detailed holder for original

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Details

355122, 355125, G03B 2762

Patent

active

046245570

ABSTRACT:
An injection-molded photomask carrier includes a base with a round opening of sufficient size and shape to permit light to pass through during a photolithographic process; at least three wall members joined to, upstanding from and framing the periphery of the base to support the edges of a photomask or a photomask/pellicle array resting on the base; a flange projecting inwardly from one of the walls, and a clip on the side of the base opposite the flange for movable engagement with the portions of the photomask or photomask/pellicle combination at its edges. A container for the carrier is complementary in size and shape to the carrier, injection-molded, and includes an injection-molded cover for the container.

REFERENCES:
patent: 280166 (1883-06-01), Flammang
patent: 1225957 (1917-05-01), Hollister
patent: 1324203 (1919-12-01), Maxwell
patent: 1946810 (1934-02-01), Rowell
patent: 2001062 (1935-05-01), Grant
patent: 2222094 (1940-11-01), Talbot
patent: 2444505 (1948-07-01), Grogan
patent: 2598911 (1952-06-01), Helberg
patent: 4106871 (1978-08-01), Roberts
patent: 4445775 (1984-05-01), Tongel
patent: 4455082 (1984-06-01), Lepist

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