Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Patent
1990-12-17
1992-01-21
Bowers, Jr., Charles L.
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Radiation mask
430394, 430 20, 430 22, 430311, G03F 900
Patent
active
050827553
ABSTRACT:
Photoresist layers are rapidly exposed in a pattern determined by electronically stored data by exposure of the photoresist through a high resolution liquid crystal shutter array.
REFERENCES:
patent: 4610940 (1986-09-01), Araihara
Bowers Jr. Charles L.
Davis Jr. James C.
General Electric Company
Snyder Marvin
Weddington J.
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