Liquid crystal programmable photoresist exposure method for maki

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask

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Details

430394, 430 20, 430 22, 430311, G03F 900

Patent

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050827553

ABSTRACT:
Photoresist layers are rapidly exposed in a pattern determined by electronically stored data by exposure of the photoresist through a high resolution liquid crystal shutter array.

REFERENCES:
patent: 4610940 (1986-09-01), Araihara

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