Laser processing apparatus and laser processing method

Coherent light generators – Particular resonant cavity – Specified output coupling device

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H01S 308

Patent

active

052609650

ABSTRACT:
In a laser processing apparatus according to the present invention, an aberration compensating device is provided between a beam forming section and a half mirror. The compensating device makes a focal point of visible light used as reference light during observation and a focal point of infrared laser light used during processing coincide with each other. In one embodiment of the aberration correcting device includes an aberration correcting convex lens having long focal length and a space portion provided in a rotatable lens holder. When observing an object to be processed, the lens holder is rotated to bring the space portion into an optical path. During processing, the lens holder is rotated to bring the convex lens for correction into the optical path, e.g. when emitting the laser beam. The laser beam is converged until incidence on the objective lens by the convex correcting lens to correct the aberration. As the aberration compensating device, a combination of a concave lens and a convex lens having different refractive indexes and the same focal length may also be employed. Otherwise, a concave lens may be provided to make a beam waist of the laser beam coincide with the portion to be processed.

REFERENCES:
patent: 4769530 (1988-09-01), Miyahara

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