Piezoelectric device and a package

Details Piezoelectric device and a package Piezoelectric device and a package

1994-12-07

1996-12-31

Dougherty, Thomas M.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310361, 310365, 310368, H01L 4108

Patent

active

055897240

ABSTRACT:
A piezoelectric device includes a piezoelectric plate provided with at least one electrode at almost a central portion of each face; a first plate made of an ionic material having a recessed portion to cover the at least one electrode at one face to face the piezoelectric plate; and a second plate made of an ionic material having a recessed portion to cover the at least one electrode at one face to face the piezoelectric plate. Each of the at least one electrode is packaged by direct bonding the piezoelectric plate with the first plate and the second plate so as to be sandwiched therebetween. A package includes a body member made of an ionic material provided with a recessed portion or an opening, having a flat face around the recessed portion or the opening; and a covering member made of an ionic material having a flat face to cover the body member. The flat face of the body member and the flat face of the covering member are cleaned and attached to each other so as to be direct bonded with each other using hydrogen bonds generated between the ionic materials, thereby packaging the recessed portion or the opening.

REFERENCES:
patent: 2268365 (1941-12-01), Willard
patent: 4293986 (1981-10-01), Kobayashi et al.
patent: 4362961 (1982-12-01), Gerber
patent: 4464598 (1984-08-01), Besson et al.
patent: 4479070 (1984-10-01), Frische et al.
patent: 4633122 (1986-12-01), Radice
patent: 4639631 (1987-01-01), Chason et al.
patent: 5302879 (1994-04-01), Totty et al.
patent: 5304887 (1994-04-01), Heinecke et al.
M. Murakami et al., "Development of Compact Surface Mounting Tape Quartz Crystal Resonator Measuring 7.0.times.5.0.times.2.3 mm.sup.3 ", Nikkei Electronics, pp. 163-169, Jan. 7, 1991 (partial translation provided).
C. Kittel, "3 Crystal Binding", Introduction to Solid State Physics, fifth edition, pp. 92-97 (1976).

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