Semiconductor acceleration sensor for detecting acceleration in

Details Semiconductor acceleration sensor for detecting acceleration in Semiconductor acceleration sensor for detecting acceleration in

Filed on

1995-08-08

Date issued

1996-12-31

Examiner

Chapman, John E.

Patent Class

Measuring and testing

SubClass

Speed, velocity, or acceleration

SubSubClass

Acceleration determination utilizing inertial element

Other Related Categories

G01P 1512

Type

Patent

Status

active

Patent number

055896340

Description

ABSTRACT:
A semiconductor acceleration sensor capable of sensing acceleration in two orthogonal directions has an acceleration sensor beam which is provided with a diaphragm 9 formed in the reverse side thereof. The diaphragm is narrowed by, for example, etching also in Z-axis direction which is the widthwise direction of the acceleration sensor beam, so that the acceleration sensor beam is easily deflectable also in the Z-axis direction. A first group of gauge resistors forming a bridge circuit are arranged on a first side of the diaphragm 9 at portions adjacent to the pedestal which cantilevers the acceleration sensor beam. A second group of resistors forming another bridge circuit are arranged on the first side of the diaphragm 9 at portions adjacent to the corners of the diaphragm. Alternatively, the second group of gauge resistors may be arranged on a narrowed portion of the acceleration sensor beam, formed at a location other than that of the diaphragm. The acceleration sensor is capable of detecting acceleration in two orthogonal directions, thus making it possible to reduce the number of acceleration sensors in a system which requires acceleration detection in two or three directions.

REFERENCES:
patent: 4522072 (1985-06-01), Sulouff et al.

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