Method of gettering heavy-metal impurities from silicon substrat

Details Method of gettering heavy-metal impurities from silicon substrat Method of gettering heavy-metal impurities from silicon substrat

1990-05-16

1991-02-19

Hearn, Brian F.

Fishing, trapping, and vermin destroying

437 10, 437173, 148DIG60, 148DIG61, H01L 21322

Patent

active

049943995

ABSTRACT:
A method of gettering heavy metal impurities from p-type silicon substrates comprises the prior step of forming an intrinsic gettering layer covered with a surface denuded zone in the silicon substrate by subjecting the substrate to heat treatments which form the intrinsic gettering layer having a large density of crystal microdefects compared to the density of crystal microdefects in the denuded zone; then the step of performing most of the required wafer processes other than the step of forming a metal layer; and subsequently the gettering step of heating the silicon substrate to a predetermined temperature and simultaneously irradiating the substrate with light rays, the predetermined temperature being selected to be within the temperature range 150.degree. C. to 220.degree. C., preferably around 200.degree. C.

REFERENCES:
patent: 4144099 (1979-03-01), Edmonds et al.
patent: 4181538 (1980-01-01), Norayan et al.
patent: 4314595 (1982-02-01), Yamamoto et al.
patent: 4319119 (1982-03-01), Runge
patent: 4376657 (1983-03-01), Nagasawa et al.
patent: 4548654 (1985-10-01), Tobin
patent: 4561171 (1985-12-01), Schlosser
patent: 4668304 (1987-05-01), Schachameyer et al.
patent: 4681983 (1987-07-01), Markvort et al.
patent: 4782029 (1988-11-01), Takemura et al.
patent: 4851358 (1989-07-01), Huber

Affiliated with

Also associated with

Rating

Method of gettering heavy-metal impurities from silicon substrat does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of gettering heavy-metal impurities from silicon substrat, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of gettering heavy-metal impurities from silicon substrat will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1143251