Coating processes – Coating by vapor – gas – or smoke – Metal coating
Patent
1994-11-29
1996-12-31
King, Roy V.
Coating processes
Coating by vapor, gas, or smoke
Metal coating
427253, 427287, 427124, 427125, C23C 1600
Patent
active
055894259
ABSTRACT:
A process of growing a film of a metal on a substrate in a selective area thereof by chemical vapor deposition, the process comprising the steps of: preparing a source having a molecule comprising a metal and a radical; providing a substrate having a selective area made of a first substance which is unreactive with the radical and the other area made of copper which is reactive with the radical; and supplying the source onto the substrate held at a film growing temperature to induce a reaction on the substrate, such that, in the selective area, the molecule of the source is bonded to the first substance and decomposed to precipitate the metal on the first substance while, in the other area, the radical of the molecule is combined with the copper to cover the other area of the substrate with a coating which is unreactive with the molecule of the source.
REFERENCES:
patent: 4888204 (1989-12-01), Tutt et al.
patent: 5316796 (1994-05-01), Awaya et al.
P. F. Seidler et al., "Low Temperature Selective Area Chemical Vapor Deposition of Gold Films: Growth and Characterization", Mat. Res. Soc. Symp. Proc. vol. 282, 1993, pp. 359-364.
Hoshino Masataka
Misawa Nobuhiro
Fijitsu Limited
King Roy V.
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