Gas and liquid contact apparatus – Fluid distribution – Valved
Patent
1995-09-25
1996-12-31
Miles, Tim R.
Gas and liquid contact apparatus
Fluid distribution
Valved
261120, 2611211, B01F 304
Patent
active
055891101
ABSTRACT:
A metal organic compound container apparatus for containing a liquid metal organic compound, receiving a carrier gas, and producing a carrier gas stream saturated with vapor of the metal organic compound including a container for containing a liquid metal organic compound; an inlet pipe for introducing a carrier gas into the container, the inlet pipe having an end for immersion in the metal organic compound; a carrier gas flow rate controller for controlling carrier gas flow into the inlet pipe; a first exhaust pipe for exhausting carrier gas from the container at a first flow rate, the first exhaust pipe having an end not contacting the metal organic compound; a first gas flow rate controller for controlling one of pressure and the first flow rate of the carrier gas through the first exhaust pipe; a second exhaust pipe for exhausting carrier gas from the container at a second flow rate, the second exhaust pipe having an end not contacting the metal organic compound; and a second gas flow rate controller for controlling the second flow rate.
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Kageyama Shigeki
Kaneno Nobuaki
Karakida Shoichi
Motoda Takashi
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