Laser sputtering apparatus

Details Laser sputtering apparatus Laser sputtering apparatus

1993-03-10

1995-11-21

Paschall, Mark H.

Electric heating

Metal heating

By arc

21912168, 21912175, 427586, 427509, B23K 2602, B23K 2600

Patent

active

054689309

ABSTRACT:
A laser sputtering apparatus includes a laser oscillator for emitting laser beams, a target-supporting member supporting a flat target thereon and being rotatable in a vacuum chamber while the target is inclined relative to the target-supporting member, a driving device for rotating the target-supporting member, a substrate-supporting member for supporting the substrate parallel with the target-supporting member, and an optical device for irradiating the target with the beams emitted by the laser oscillator.

REFERENCES:
patent: 4604294 (1986-08-01), Tanaka et al.
patent: 5196101 (1993-03-01), Thakoor
patent: 5238546 (1993-08-01), Bergmann et al.
patent: 5242706 (1993-09-01), Cotell et al.
patent: 5264412 (1993-11-01), Ota et al.
patent: 5308461 (1994-05-01), Ahonen
patent: 5322817 (1994-06-01), James et al.

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