Method for improving characteristics of parasitic PN diodes in s

Fishing – trapping – and vermin destroying

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437 47, 437 60, H01L 2170, H01L 2700

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active

054119103

ABSTRACT:
The present invention relates to a method for improving characteristics of parasitic pn diodes in a static random access memory using a PMOS TFT.
Disclosed herein is a method for improving characteristics of parasitic pn diodes which comprises the step of implanting impurities having a type opposite to that of impurities doped in a previously formed polysilicon layer in a contact area of the previously formed polysilicon layer.

REFERENCES:
patent: 4890144 (1989-12-01), Teng et al.
patent: 5170227 (1992-12-01), Kaneko et al.

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