Method of producing micromechanical devices

Details Method of producing micromechanical devices Method of producing micromechanical devices

1993-09-29

1995-05-02

Pianalto, Bernard

Coating processes

Direct application of electrical, magnetic, wave, or...

Pretreatment of substrate or post-treatment of coated substrate

427162, 4272556, 427294, 427301, 427307, 427314, 427539, B05D 306

Patent

active

054117690

ABSTRACT:
It is possible to use an oriented monolayer to limit the Van der Waals forces between two elements by passivation. The invention disclosed here details how to do so by building the device to be passivated, cleaning the surface to be passivated, activating the surface, heating it along with the material to be used as the monolayer, exposing a vapor of the material to the surface and evacuating the excess material, leaving only the monolayer.

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