Coherent light generators – Particular active media – Gas
Patent
1989-02-22
1990-06-26
Scott, Jr., Leon
Coherent light generators
Particular active media
Gas
372 59, H01S 322
Patent
active
049378376
DESCRIPTION:
BRIEF SUMMARY
TECHNICAL FIELD
The present invention relates to a gas laser device for effecting a laser oscillation while circulating a laser gas therein, and more particularly, to a gas laser device in which a discharge tube can be automatically filled with a laser gas to an atmospheric pressure level when the gas laser device is stopped.
BACKGROUND ART
To ensure a high-speed circulation of a laser gas in a gas circulation-type laser device, a Roots blower having a gearbox filled with oil is employed, and therefore, oil vapor from the gearbox tends to adhere to the optical components of a laser oscillator device. Thus the life of these components is shortened.
Therefore, during the operation of the gas laser device, gas is continuously exhausted from the gearbox filled with oil, to create a vacuum therein and thus prevent the oil from entering the discharge tube and the like in which the laser gas is circulated. On the other hand, when the operation of the gas laser device is stopped, the gearbox is filled with the laser gas to a pressure equivalent to the atmospheric pressure, to prevent oil from entering the discharge tube and the like while the device is inoperative.
The process of filling the laser gas to the atmospheric pressure level is executed manually by an operator, and therefore, problems arise in that the operator may omit the filling process or may turn off the power supply before the atmospheric pressure level is reached, with the result that the laser gas is not filled to a predetermined pressure level.
DISCLOSURE OF THE INVENTION
An object of the present invention is to provide a gas laser device which solves the above-mentioned problems and in which a discharge tube can be automatically filled with a laser gas to an atmospheric pressure level when the operation of the device is stopped.
To solve the above problems, the present invention provides a gas laser device for effecting a laser oscillation while circulating a laser gas therein, which comprises:
a laser gas supply unit;
a gas supply valve arranged at an outlet of the laser gas supply unit;
an exhaust unit for exhausting the laser gas from a discharge tube;
a pressure sensor for detecting a pressure in the discharge tube; and
gas pressure control means for detecting a pressure drop in the discharge tube by the pressure sensor and opening the gas supply valve to fill the discharge tube with the laser gas to a predetermined pressure level when operation of the gas laser device is stopped.
When the gas laser device is stopped, a pressure change occurs, and this pressure change is detected by the pressure sensor. The gas pressure control means then opens the gas supply valve to supply the laser gas from the laser gas supply unit. The process of filling the laser gas is monitored continuously by the pressure sensor until the pressure in the discharge tube reaches the predetermined level, and accordingly when the operation of the gas laser device is stopped, the discharge tube and the like are automatically filled with the laser gas to the predetermined pressure level.
BRIEF DESCRIPTION OF THE DRAWING
FIG. 1 is a block diagram illustrating an embodiment of the present invention.
BEST MODE OF CARRYING OUT THE INVENTION
An embodiment of the present invention will hereinafter be described with reference to the drawing.
FIG. 1 is a block diagram illustrating an embodiment of the present invention. In the figure, numeral 1 denotes a discharge tube, 2 a total reflection mirror, and 3 an output coupling mirror. Denoted at 4 is a Roots blower for circulating a laser gas. The discharge tube 1 is supplied with a voltage from a high-frequency power supply, not shown, and thus discharge pumping occurs within the discharge tube 1 and a laser beam is emitted. The Roots blower 4 includes a gearbox 4a containing gear oil therein, and to prevent the oil from flowing toward the discharge tube 1, gases in the gearbox 4a are exhausted by an exhaust unit, hereinafter described, and thus the pressure in the gearbox 4a is lower than the pressure in the discharge
REFERENCES:
patent: 4547885 (1985-10-01), Allen et al.
Fanuc Ltd
Jr. Leon Scott
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