Permanent magnet force rebalance micro accelerometer

Details Permanent magnet force rebalance micro accelerometer Permanent magnet force rebalance micro accelerometer

1989-02-22

1991-10-22

Hille, Rolf

357 27, 73517R, 73505, H01L 2984, H01L 2722, G01P 1508, G01P 1500

Patent

active

050600397

ABSTRACT:
An accelerometer fabricated by micromachining techniques from a crystaline precursor. The accelerometer is formed in a body of a semiconductor crystal such as silicon by doping portions to an etch resistant condition and etching a cavity around them to release a resiliently suspended multi legged member. A conductor is formed in one of the legs. A permanent magnet is placed with opposite polarity poles on either side of the leg and the acceleration displacement of the member sensed from which a current is developed through the leg conductor to restore the member position and provide an output indication of acceleration.

REFERENCES:
patent: 4483194 (1984-11-01), Rudolf
patent: 4670092 (1987-06-01), Motamedi
patent: 4711128 (1987-12-01), Boura
"A Monolithic Capacitive Pressure Sensor with Pulse-Period Output", Sanders et al., IEEE Transactions on Electron Devices, vol. ED-27, #5, May 1980, pp. 927-930.
"An Ultra Miniature Solid-State Pressure Sensor for a Cardiovascular Catheter", Chau et al., IEEE Transactions on Electron Devices, vol. ED-35, #15, Dec. 1988, pp. 2355-2361.

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