Electric resistance heating devices – Heating devices – Radiant heater
Patent
1996-07-11
1999-08-10
Walberg, Teresa
Electric resistance heating devices
Heating devices
Radiant heater
392418, 392422, 118725, A21B 200, C23C 1600
Patent
active
059371420
ABSTRACT:
A system for rapid thermal processing of a substrate in a process chamber while measuring and controlling the temperature at the substrate to establish substantially uniform substrate temperature in real time. The system includes an axisymmetrical multi-zone illuminator having a plurality of substantially concentric rings of heating lamps to direct optical power toward said substrate, a fluid cooled optical reflector facing the substrate frontside and having a relatively high optical reflectivity. The system also includes a multizone temperature measurement system having a plurality of pyrometry sensors coupled to said multi-zone illuminator, a system for real-time measurement and compensation of substrate emissivity and illuminator lamp light interference effects, and a multi-variable temperature controller for providing multi-zone real-time temperature control. The system also incorpotates a plurality of illuminator lamp power supplies.
REFERENCES:
patent: 3761678 (1973-09-01), Eckles
patent: 4640224 (1987-02-01), Bunch et al.
patent: 4649261 (1987-03-01), Sheetz
patent: 4752592 (1988-06-01), Tamura et al.
patent: 4796562 (1989-01-01), Brors et al.
patent: 4891499 (1990-01-01), Moslehi
patent: 4956538 (1990-09-01), Moslehi
patent: 5156461 (1992-10-01), Moslehi et al.
patent: 5179677 (1993-01-01), Anderson et al.
patent: 5228114 (1993-07-01), Suzuki
patent: 5255286 (1993-10-01), Moslehi et al.
patent: 5268989 (1993-12-01), Moslehi et al.
patent: 5305417 (1994-04-01), Najm
patent: 5308161 (1994-05-01), Stein
patent: 5317656 (1994-05-01), Moslehi et al.
patent: 5367606 (1994-11-01), Moslehi et al.
patent: 5436172 (1995-07-01), Moslehi
patent: 5443315 (1995-08-01), Lee et al.
patent: 5444815 (1995-08-01), Lee
patent: 5445677 (1995-08-01), Kawata et al.
patent: 5446825 (1995-08-01), Moslehi
patent: 5467220 (1995-11-01), Xu
patent: 5480489 (1996-01-01), Hawegawa et al.
patent: 5487127 (1996-01-01), Gronet
patent: 5551985 (1996-09-01), Brors
patent: 5603772 (1997-02-01), Ide
Kermani Ahmad
Lee Yong Jin
Messner William J.
Moslehi Mehrdad M.
CVC Products Inc.
Robinson Daniel L.
Walberg Teresa
LandOfFree
Multi-zone illuminator for rapid thermal processing does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Multi-zone illuminator for rapid thermal processing, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Multi-zone illuminator for rapid thermal processing will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1128184