Programmable semiconductor element having an antifuse structure

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Passive components in ics

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257 50, 438600, 365 96, H01L 2900

Patent

active

059362979

ABSTRACT:
A programmable semiconductor element having an antifuse structure is disclosed. A first insulation film is formed on a silicon substrate. First and second conductors are formed on the first insulation film. The first and second conductors are spaced apart at a contact hole region. A second insulation film is formed on the first insulation film and the first and second conductors. The second insulation film includes a contact hole at a portion corresponding to the contact hole region. The second insulation film includes a recess adjacent to the contact hole. A conductor link is formed in the recess in the second insulation film. A third insulation film is formed over the conductor link.

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