1985-03-21
1987-02-24
Davie, James W.
357 16, 357 32, 357 55, H01L 2714, H01L 3100
Patent
active
046461205
ABSTRACT:
A photodiode array structure and method of fabrication is provided. The ay is fabricated on a substrate as a multilayer structure with a novel combination of different type layers and then separated into optically independent diodes by delineation of the diodes. A novel array with heterojunction diodes for far-infrared is specifically disclosed.
REFERENCES:
patent: 4197141 (1980-04-01), Bozler et al.
patent: 4376659 (1983-03-01), Castro
patent: 4494133 (1985-01-01), Dean et al.
Davie James W.
Epps Georgia Y.
Harwell Max L.
Holford John E.
Lane Anthony T.
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