Ion source

Details Ion source Ion source

1985-12-12

1987-08-18

Anderson, Bruce C.

Radiant energy

Ion generation

Field ionization type

250423R, 31511181, 3133621, H01J 2700

Patent

active

046879382

ABSTRACT:
An ion source includes an ion source material holder adapted to load an ion source material thereon and having an aperture at the bottom thereof, an ion emitter mounted on the ion source material holder at the aperture, heating means for heating the ion source material holder and the ion emitter, and an ion extracting electrode for extracting an ion beam from the ion emitter. The ion emitter is made of a mixture of a material having a large work function and a material having a small work function, in order to be able to emit both positive ions and negative ions from the ion emitter. The polarity of a voltage applied between the ion emitter and the ion extracting electrode is changed so that one of the positive ion beam and the negative ion beam can be selectively extracted from the ion emitter.

REFERENCES:
patent: 4164680 (1979-08-01), Villalobos
patent: 4246481 (1981-01-01), Liebl
patent: 4367429 (1983-01-01), Wang et al.
patent: 4488045 (1984-12-01), Anazawa et al.

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