Radiant energy – With charged particle beam deflection or focussing – With detector
Patent
1985-12-17
1987-08-18
Anderson, Bruce C.
Radiant energy
With charged particle beam deflection or focussing
With detector
250396R, 250396ML, G01K 108, H01J 314
Patent
active
046879366
ABSTRACT:
A system for scanning a beam of charged-particles across a target is described which compensates for energy dispersion in the beam. A time-varying magnet with circular pole pieces is used to sweep the beam left to right. Two wedge-shaped magnet dipoles, one on each side of the center line are used to bend the beam parallel to the center line and compensate for beam energy dispersion.
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Brown Karl L.
McIntyre Raymond D.
Anderson Bruce C.
Cole Stanley Z.
Fisher Gerald M.
Varian Associates Inc.
Warsh Kenneth L.
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