Structure for membrane damping in a micromechanical modulator

Optical: systems and elements – Optical modulator – Light wave temporal modulation

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359291, 359295, 25022723, G02B 2600

Patent

active

056594186

ABSTRACT:
An improved micromechanical modulator that incorporates a mechanical transmission line for damping membrane vibration is disclosed. The modulator comprises a transmission line mechanically communicating with a vertically-movable membrane for receiving an optical signal. The membrane is supported over a substrate. Under the action of bias, the membrane moves toward the substrate, which causes a change in an optical property of the modulator. The transmission line receives and dissipates a sufficient amount of the energy developed in the membrane as it moves to prevent the membrane from vibrating. In one configuration, the modulator incorporates two strip-line transmission lines. In another configuration, the modulator incorporates two clamped-plate transmission lines.

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patent: 5526172 (1996-06-01), Kanack

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