Electrostatic-magnetic lens for particle beam apparatus

Details Electrostatic-magnetic lens for particle beam apparatus Electrostatic-magnetic lens for particle beam apparatus

1987-03-27

1988-11-15

Fields, Carolyn E.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250396R, 250310, 250305, H01J 4906

Patent

active

047851767

ABSTRACT:
An electrostatic-magnetic lens is provided having either a symmetrical or asymmetrical magnetic lens which is overlaid with an electrostatic immersion lens. One electrode of the immersion lens is formed as a hollow cylinder, which is within an upper pole piece of the magnetic lens concentrically relative to the axis of symmetry thereof and extending into the region of the pole piece gap. The lower pole piece of the magnetic lens is preferably at a ground potential and clad with the beam guiding tube for protection against contamination and forming the lower electrode of the electrostatic immersion lens.

REFERENCES:
patent: 4419581 (1983-12-01), Nakagawa
patent: 4546258 (1985-10-01), Chisholm
patent: 4623836 (1986-11-01), Frosien et al.
Record of the IEEE 9th Annual Symposium on Electron, Ion, and Laser Beam Technology, Berkeley, May 9-11, 1967, Pease, Editor.
U.S. Copending application Ser. No. 023,857 filed Mar. 9, 1987.
The Encyclopedia of Physics, Second Edition, edited by R. M. Besancon.

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