Digital electrochemical etching of compound semiconductors

Details Digital electrochemical etching of compound semiconductors Digital electrochemical etching of compound semiconductors

1993-05-28

1995-01-31

Niebling, John

Chemistry: electrical and wave energy

Processes and products

Electrostatic field or electrical discharge

2041293, 437234, C25F 312

Patent

active

053856511

ABSTRACT:
A method for the digital electrochemical etching of compound semiconductors in an electrochemical flow cell system in which alternating electrochemical potentials are applied between a reference electrode and the compound semiconductor sufficient to strip portions, preferably atomic layers, of the elements of compound semiconductors from the compound semiconductors.

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