Hetero bipolar transistor and method of manufacturing the same

Active solid-state devices (e.g. – transistors – solid-state diode – Heterojunction device – Bipolar transistor

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257514, 257518, H01L 2972

Patent

active

053650905

ABSTRACT:
The specification discloses a hetero bipolar transistor which comprises a semiconductor substrate, a first silicon layer serving as a collector, a first silicon-germanium layer serving as a base, a second silicon layer serving as a collector, and a second silicon-germanium layer. A side wall of the second silicon-germanium layer is in contact with side walls of the first silicon layer, the first silicon-germanium layer and the second silicon layer. The second silicon-germanium layer is disposed to surround the first silicon layer, the first silicon-germanium layer, and the second silicon layer, and has an energy band gap substantially the same as that of the first silicon-germanium layer.

REFERENCES:
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patent: 4963957 (1990-10-01), Ohi et al.
patent: 4969026 (1990-11-01), Vander Velden et al.
patent: 5006912 (1991-04-01), Smith et al.
patent: 5140400 (1992-08-01), Morishita
patent: 5198689 (1993-03-01), Fujioka
Cressler et al., `Sub-30-PS ECL Circuit . . . SiGe-Base Bipolar Transistors`, IEEE Electron Device Letters, vol. 12, No. 4, Apr. 1991, pp. 166-168.

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