Laser beam error correcting process

Details Laser beam error correcting process Laser beam error correcting process

1977-12-22

1979-05-15

Buczinski, S. C.

Optics: measuring and testing

Angle measuring or angular axial alignment

With photodetection remote from measured angle

219121LM, 250201, 356400, G01B 1126

Patent

active

041545303

ABSTRACT:
A laser beam is employed to trim monolithic integrated circuits in wafer form in a step and repeat machine. The step and repeat action is adjusted to bring successive circuits on the wafer into trimming relationship with the laser. The circuit is measured and trimming accomplished to adjust the circuit performance to a precise specification. The step and repeat operation introduces a small error that accumulates as stepping proceeds. A laser beam error detector pattern is incorporated into the integrated circuit wafer and is designed to produce a response when the beam impingement error exceeds a predetermined value. The detector output causes the laser beam to be translated by an increment equal to the error and in the opposite direction. As a result, the laser beam aiming error is controlled by a known pattern rather than by an unknown cumulative error.

REFERENCES:
patent: 2352179 (1944-06-01), Bolsey
patent: 3316800 (1967-05-01), Kibler
patent: 3388461 (1968-06-01), Lins
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patent: 3699649 (1972-10-01), McWilliams
patent: 3758745 (1973-09-01), Wilker et al.
patent: 3838274 (1974-09-01), Doubek, Jr. et al.
patent: 3966329 (1976-06-01), Dickey
patent: 3989385 (1976-11-01), Dill et al.

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