Measurement method and apparatus for alignment

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356400, 358100, G01B 1100, H04N 718

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active

046412573

ABSTRACT:
A measurement apparatus, includes a detector for detecting marks of plural objects to produce a series of signals; a peak detector for detecting peak values of the signals; a device for determining a slice level for each of the peak values detected by the peak detector; and a comparator for sequentially comparing the signals with respective slice levels determined by the slice level determining device and determining an interval between the marks on the basis of the comparison.

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patent: 4545684 (1985-10-01), Kuroki et al.
patent: 4553845 (1985-11-01), Kuroki et al.

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