Polishing apparatus

Details Polishing apparatus Polishing apparatus

1991-01-22

1992-01-21

Rachuba, M.

Abrasive tool making process, material, or composition

With carbohydrate or reaction product thereof

511314, 51216LP237R, B24B 500

Patent

active

050817957

ABSTRACT:
A polishing apparatus for polishing an object to be polished at a high flatness includes at least one plate with at least one object to be polished secured at an underside thereof, a head section surrounding the plate with a predetermined gap therebetween, a pressure applying device for applying a pressing force to the top of the plate, and a holding device for holding the plate in the plane of the polishing movement of the object to be polished. The pressure applying device and the holding device are both disposed in an inner space of the head section, the latter being movable perpendicular to the plane of the polishing movement. The attaching position of the holding device on the outer surface of the plate is set substantially at the same height as or at a position lower than the attaching position of the holding device on the inner surface of the head section. The intersecting point of the imaginary lines through the fixing positions of the holding device on the head section and those corresponding to them on the plate substantially lies on or at a position lower than the polishing surface of the object to be polished.

REFERENCES:
patent: 3886693 (1975-06-01), Bruck
patent: 4459785 (1984-07-01), Zimmer
patent: 4897966 (1990-02-01), Takahashi

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